FIG. 2.
Diamond films grown in He/H2/CH4 plasma at different He contents and no N2: (a) FWHM of the (111) diamond XRD peak and calculated average diamond grain size and (b) rms surface roughness of the films calculated from 2 × 2 μm AFM images.
Diamond films grown in He/H2/CH4 plasma at different He contents and no N2: (a) FWHM of the (111) diamond XRD peak and calculated average diamond grain size and (b) rms surface roughness of the films calculated from 2 × 2 μm AFM images.