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. Author manuscript; available in PMC: 2008 Oct 21.
Published in final edited form as: J Mater Res. 2006 Oct;21(10):2675–2682. doi: 10.1557/JMR.2006.0334

FIG. 2.

FIG. 2

Diamond films grown in He/H2/CH4 plasma at different He contents and no N2: (a) FWHM of the (111) diamond XRD peak and calculated average diamond grain size and (b) rms surface roughness of the films calculated from 2 × 2 μm AFM images.