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. Author manuscript; available in PMC: 2008 Oct 21.
Published in final edited form as: J Mater Res. 2006 Oct;21(10):2675–2682. doi: 10.1557/JMR.2006.0334

FIG. 4.

FIG. 4

Optical emission spectra of the He/H2/CH4/N2 microwave plasmas with different ratios of N2/CH4: (a) N2/CH4 = 0.4 and (b) N2/CH4 = 0.05. It is to be noted that the intensity scales in the two spectra are different; CN peaks increase in intensity by a factor of ten in (a).