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. Author manuscript; available in PMC: 2009 Apr 1.
Published in final edited form as: Biomed Microdevices. 2008 Oct;10(5):623–629. doi: 10.1007/s10544-008-9173-8

Table 1. Comparison of the electrical properties of single- and dual- layer DLC:N film electrodes.

Film Thickness t (nm) Sheet resistance Rs (Ω/cm2) Resistivity ρ=Rst (Ω*cm) Electrode resistance (Ω)
DLC:N 210 4.48 × 104 0.94 3∼4 M Ω
DLC:N on ITO 200 126.8 2.536 × 10-3 4∼6 k Ω