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Optical micrographs of the microhotplate sensors. A 16-element array is shown in the upper portion, and a magnified view of one of the elements is shown in the lower portion. Bright features on the microhotplates are the platinum interdigitated electrodes that electrically contact the sensing films. Coloration of the microhotplates comes from optical interference caused by the sensing films. Dark regions indicate the micromachined etch pit that provides thermal isolation.
