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. Author manuscript; available in PMC: 2009 Sep 15.
Published in final edited form as: Sens Actuators A Phys. 2008 Sep 15;147(1):83–92. doi: 10.1016/j.sna.2008.03.024

TABLE V.

Simulated Sensor Characteristics vs. Thickness for Design (A)

Thickness R ΔR/R Stiffness
(µm) (Ω) (%) (mN/µm)
35 3.41 1.23 0.060
50 2.38 1.24 0.086
65 1.83 1.23 0.112
80 1.48 1.22 0.138
95 1.25 1.21 0.163