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. Author manuscript; available in PMC: 2008 Dec 10.
Published in final edited form as: J Microelectromech Syst. 2008 Jun;17(3):688–697. doi: 10.1109/JMEMS.2008.918384

Fig. 10.

Fig. 10

Measured electrostatic frequency response of ten different 1.5 mm diameter microphone structures with 6 μm gap height fabricated on the same silicon wafer (colored traces) and corresponding simulation (solid and labeled black trace).