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. Author manuscript; available in PMC: 2008 Dec 10.
Published in final edited form as: J Microelectromech Syst. 2008 Jun;17(3):688–697. doi: 10.1109/JMEMS.2008.918384

Fig. 2.

Fig. 2

Three-dimensional computer-generated cross sections of the silicon microphone structure showing (a) the microphone diaphragm and (b) diaphragm removed to show the details of the underlying backplate.