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. Author manuscript; available in PMC: 2008 Dec 10.
Published in final edited form as: J Microelectromech Syst. 2008 Jun;17(3):688–697. doi: 10.1109/JMEMS.2008.918384

Fig. 4.

Fig. 4

(a) Electrostatic impulse response of the microphone diaphragm displacement as measured optically in vacuum. (b) FFT of the impulse response (i.e., the dynamic frequency response of the device in vacuum).