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. Author manuscript; available in PMC: 2008 Dec 10.
Published in final edited form as: J Microelectromech Syst. 2008 Jun;17(3):688–697. doi: 10.1109/JMEMS.2008.918384

Fig. 7.

Fig. 7

Simulated film pressure across the microphone diaphragm and backplate for the first three axisymmetric modal displacement profiles (units in nanopascal) following application of 1 nm/s peak modal velocity at 1 kHz.