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. Author manuscript; available in PMC: 2008 Dec 10.
Published in final edited form as: J Microelectromech Syst. 2008 Jun;17(3):688–697. doi: 10.1109/JMEMS.2008.918384

TABLE I.

Normalized Modal Forces for Electrostatic Excitation. All Other Modes Between 1 and 15 Have a Force Less Than 0.001 and Do Not Contribute to the Dynamic Response

mode 1 mode 6 mode 8 mode 15
normalized modal force 1 0.38 0.6 0.32