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. Author manuscript; available in PMC: 2009 Jan 2.
Published in final edited form as: Sens Actuators A Phys. 2007 Feb 28;134(1):221–230. doi: 10.1016/j.sna.2006.04.052

Fig. 1.

Fig. 1

Layout of the AOptix DM: plan view of electrodes (top) and cross-sectional view (bottom). The numbering of the actuator channels is indicated on the plan view.