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. Author manuscript; available in PMC: 2009 Jan 2.
Published in final edited form as: Sens Actuators A Phys. 2007 Feb 28;134(1):221–230. doi: 10.1016/j.sna.2006.04.052

Fig. 5.

Fig. 5

Measurement of actuator linearity and hysteresis. The front face and guard ring electrodes are held at 100 V while all the remaining back face electrodes (channels 1–35) are driven from 0 to 300 V.