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. Author manuscript; available in PMC: 2009 Jan 2.
Published in final edited form as: Sens Actuators A Phys. 2007 Feb 28;134(1):221–230. doi: 10.1016/j.sna.2006.04.052

Fig. 6.

Fig. 6

Replication of Zernike mode shapes using the open-loop control method. The maximum PV amplitude and RMS residual error (ER) are indicated for each mode.