Table 2. Constants in the mathematical relationship between spin speed and PDMS film thickness.

Concentration of PDMS in TBA by weight	α	k
100%	−0.98	22,000
50%	−0.60	760
33%	−0.35	69
25%	−0.281	26.3
17%	−0.138	4.97

The parameters α and k are derived from the least-squares fit of the data summarized in Figure 2 using Equation 1 where angular velocity is in RPM and thickness is in µm.