Table 1.

Deconvolution of C(1s) XPS peak components for polystyrene exposed to 25- and 50-eV CF₃⁺ and C₃F₅⁺

Component	Binding energy, eV	25-eV CF3+, %	25-eV C3F5+, %	50-eV CF3+, %	50-eV C3F5+, %
CH	285.0	73	54	38	12
CF/CCFn	286.2	20	31	33	42
CFCFn	288.7	0.2	8	15	26
CF2	291.1	3	7	10	16
CF3	293.3	4	0	4	4
Atomic percent of C bound α or β to F, from C(1s)		27	46	62	88
F atomic percent from corrected F(1s)/C(1s) ratio		30	40	54	59

All ion fluences equivalent to 1.5 × 10¹⁶ F atoms/cm². Shown are averages of ion modified data in Fig. 1 and one replicate set of each data.