Table 2.
Prototype Code | Deposition Method | Array Design | Deposition Date | Thickness (μm) | Barrier Type |
---|---|---|---|---|---|
PVD#1 | PVD | ND10 | 12/02 | 300 | D |
PVD #2 | PVD | ND10 | 12/02 | 300 | A |
PVD #3 | PVD | ND10 | 04/03 | 290 | A |
PVD #4 | PVD | ND10 | 05/03 | 210 | A |
PVD #5 | PVD | ND10 | 06/03 | 265 | D |
PVD #6 | PVD | ND10 | 07/03 | 280 | D |
PVD #7 | PVD | ND10 | 08/03 | 300 | D1 |
PVD #8 | PVD | ND10 | 08/03 | 300 | D2 |
PVD #9 | PVD | ND10 | 08/03 | 300 | D1 |
PVD #10 | PVD | ND10 | 11/03 | 230 | D2.1 |
PVD #11 | PVD | ND10 | 11/03 | 225 | D2 |
PVD #12 | PVD | ND10 | 01/04 | 280 | D2.2 |
PVD #13 | PVD | ND10 | 01/04 | 285 | D2.3 |
PVD #14 | PVD | ND10 | 06/04 | 230 | D2.3 |
PVD #15 | PVD | MD88 | 09/05 | 290 | D2.4 |
PVD #16 | PVD | MD88 | 01/06 | 280 | D2.4 |
PIB#1 | PIB | ND10 | 06/04 | 460 | D2 |
PIB#2 | PIB | ND10 | 10/04 | 615 | D2 |
PIB#3 | PIB | MD88 | 09/05 | 620 | D2 |
PIB#4 | PIB | MD88 | 01/06 | 635 | D2 |