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. Author manuscript; available in PMC: 2009 Jul 8.
Published in final edited form as: J Am Chem Soc. 2006 Aug 30;128(34):11018–11019. doi: 10.1021/ja061097d

Figure 2.

Figure 2

TEM images demonstrating the pore-sealing effectiveness by PA-ALD: a) regular cross-sectional TEM image showing the mesoporous sample treated by PA-ALD pore-sealing process and then exposed to TiO2 ALD conditions; b) Ti- mapping image in the same area acquired with electron-energy-loss image filtering mode