Table 1. Dimensions of Channels in Gas Layer, and the Corresponding Fluidic Resistances, Scaled Reynolds Numbers (Re*), and Scaled Peclet Numbers (Pe*).
Dimensions |
||||||
---|---|---|---|---|---|---|
channel | W [μm] | H [μm] | L [μm] | maximum resistance [Ns/m5] | maximum Re*a | maximum Pe*b |
Rin | 100 | 40 | 7000 | 3.51 × 1011 | 0.023 | 0.14 |
Rout | 100 | 40 | 18000 | 9.02 × 1011 | 0.003 | 0.03 |
Rv | ∼20 | 40 | ∼2000 | 2.19 × 1012 | 0.009 | 0.08 |
Rh | 100 | 40 | 500 | 2.51 × 1010 | 0.267 | 0.11 |
Re* ≈ ρUL/μ × H2/L2.
Pe* ≈ UW/D × W/L.