TABLE I.
Image | Circles (A) | Triangles (B) | Triangles (C) | Squares (D) |
---|---|---|---|---|
Designed: size/separation, nm | 200/65 | 200/65 | 175/90 | 175/90 |
Obtained: size/separation, nm | 195/67 | 193/80 | 171/91–101 | 179/83 |
Image | Circles (A) | Triangles (B) | Triangles (C) | Squares (D) |
---|---|---|---|---|
Designed: size/separation, nm | 200/65 | 200/65 | 175/90 | 175/90 |
Obtained: size/separation, nm | 195/67 | 193/80 | 171/91–101 | 179/83 |