Table 3. Optomechanical Tolerances and Tolerance Sensitivities Analysis.

Parameter	Nom. (mm)	Tol. (mm)	rms WFE (λ)	Sen. (λ/mm)
Lens 1
S2	1.28	0.020	0.002	0.10
Thick	0.8	0.050	0.044	0.88
Space (L1–L2)	0.354	0.020	0.020	1.00
Lens 2
S1	3.632	0.020	0.004	0.20
S2	1.491	0.010	0.010	1.00 (3)
Thick	1.5	0.020	0.018	0.90
Tilt (elem)	0	0.010	0.017	1.67 (2)
Dec (elem)	0	0.008	0.037	4.67 (1)
Space (L2–L3)	3.443	0.020	0.012	0.62
Lens 3
S1	2.019	0.010	0.010	1.00
Thick	2.5	0.020	0.005	0.24
Tilt (elem)	0	0.010	0.002	0.22
Dec (elem)	0	0.010	0.005	0.50
Space (L3-ima)	0.967	0.020	0.013	0.65
RSS rms WFE			0.070