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Image of the micropump, micropositioners, and valves. (A) The cross-sectional geometry of the valve. The width of the microvalves was 200 μm, and the length was 3 mm. (B) A close-up image of the valve clamps used to secure the valves in place. (C) The full micropump design with the micropositioners, piezoelectric cantilevers, and PDMS channel structure on a glass substrate.
