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Tilted-view SEM images of a high-throughput sample preconcentration device. It consists of two parallel 50-μm-wide channels, bridged by an embedded nanochannel array. The gap size of a nanochannel is 170 nm. All the channels have the same depth of 12 μm. The microchannels and nanochannels are etched by DRIE and KOH etching, respectively.
