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. Author manuscript; available in PMC: 2010 Apr 1.
Published in final edited form as: J Microelectromech Syst. 2009 Apr 1;18(2):405–413. doi: 10.1109/JMEMS.2009.2013398

Figure 2.

Figure 2

Schematic of designs A and B. (a) Fixed electrodes 1 and 2 in design A can be used for actuation and sensing. (b) Fixed electrodes 1 and 2 in design B are both used for actuation. Another pair of electrodes 3 and 4 is included to allow for sensing.