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. Author manuscript; available in PMC: 2010 Apr 1.
Published in final edited form as: J Microelectromech Syst. 2009 Apr 1;18(2):405–413. doi: 10.1109/JMEMS.2009.2013398

Figure 6.

Figure 6

(a) Actuator displacement was found to vary linearly with the square of applied voltage. The actuator was operated in DI water with a square signal at 1MHz frequency. The voltage axis denotes the RMS value. (b) Actuator displacement at constant RMS of 3.5 V plotted as a function of frequency. The plots are normalized to the maximum displacement of 8 μm.