Table 1.

XPS - Elemental Quantification

	DLC		Sample 1			Sample 2			Sample 3
Depth	C 1s %	O 1s %	C 1s %	F 1s %	O 1s %	C 1s %	F 1s %	O 1s %	C 1s %	F 1s %	O 1s %
2 – 3 nm	88.4	11.6	53.3	44.2	2.5	49	48.4	2.6	40.6	58.1	1.2
5 – 7 nm	89.1	10.9	60.1	37.7	2.1	53	44.1	2.9	38.6	60.1	1.2
6 – 9 nm	89.4	10.6	61	36.9	2.1	54.2	42.9	2.9	36	62.3	1.6