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. Author manuscript; available in PMC: 2010 Apr 21.
Published in final edited form as: Lab Chip. 2009 Jan 19;9(8):1119–1127. doi: 10.1039/b816575k

Figure 3.

Figure 3

Multilayer PDMS devices were fabricated using toner transfer masking (TTM) and multilayer soft lithography (MLS). (a) Wide-field images of two brass masters and the final device made with micro-pneumatic valves using MLS (left: pneumatic master, middle: fluidic master, right: final device). Image shows the fourth valve from left during actuation. (b) Image of assembled crossing PDMS valve structures, with air in the pneumatic channels (lower) and dye solution in the fluidic channels (upper). (c) Image of a sliced cross-section of a PDMS valve from (b), showing the membrane thickness of 26.6 ± 0.7 μm (±σ) above a pneumatic actuation channel of 74.0 ± 1.1 μm depth and ∼560 μm width. (d) Image of crossing channels in a three-dimensional channel network, including vias with average volume of 2.5 ± 0.6 nL, made using TTM and MLS. Scale bars are 1 mm in (a), (b), and (d); 100 μm in (c).