Table II. Dimensional Measurements of Three-Point Bend Test Bars.

	Process Step	Width (μm)	±95% Conf.	Thickness (μm)	±95% Conf.	Length (μm)	±95% Conf.
	Design	33.3	NA	25.0	NA	416.7	NA
	Mold	32.4 (12)	0.5	23.3 (12)	0.5	414.7 (12)	0.7
	Green Part in Mold	34.8 (17)	0.2	20.8 (17)	0.6	415.6 (17)	0.5
	Post-RIE	33 (17)	1	23.0 (17)	0.7	423 (17)	2
	Sintered	25.8 (65)	0.5	17.4 (37)	0.3	332.1 (65)	0.6
% Change	In mold to sintered	-26%	2%	−16%	3%	−20.1%	0.2%
	Post-RIE to sintered	-23%	4%	−24%	3%	−21.5%	0.5%
	Design to sintered	-23.0%	0.7%	−30.5%	0.7%	−20.29%	0.05%

The percent change between the design, as-molded, and post-RIE dimensions versus the sintered dimensions. The number of samples measured is given inside the parentheses. RIE, reactive ion etching.