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. Author manuscript; available in PMC: 2009 Oct 5.
Published in final edited form as: Surf Sci. 2008 Jul 15;602(14):2402–2411. doi: 10.1016/j.susc.2008.05.027

Fig. 12.

Fig. 12

Infrared spectra of PECVD-Si-Ti (A) and after treating PECVD-Si-Ti with 5 min of air/H2O2 plasma (B). The spectra were acquired on a Nicolet Avatar® 370MCT spectrometer equipped with a smart apertured grazing angle (SAGA) accessory.