Figure 1.
Schematic of the patterning technique. 1. Surface dissolution - Acetic acid is applied to the CG membrane surface. 2. Feature resolution - After the top layer of the CG membrane has been dissolved the silicon wafer with photoresist is positioned on the membrane surface and pressure is applied. 3. Feature stabilization - The system is immersed in glutaraldehyde to crosslink the membrane and to stabilize the patterned features. 4. Separation - The silicon wafer and CG membrane are separated resulting in a patterned CG membrane.