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. Author manuscript; available in PMC: 2010 Apr 1.
Published in final edited form as: J Microelectromech Syst. 2009 Apr 1;18(2):396–404. doi: 10.1109/JMEMS.2009.2013391

Figure 1.

Figure 1

Micrographs of thermal actuators (a) the front surface of the MEMS device showing all three microelectrodes and their microactuators (chip is 3mm wide and 6mm long) (b) close-up of the right microelectrode (50 µm wide) and the electro-thermal strips that move the microelectrodes (encircled) (c) SEM of the circled region of (b) showing the thermal actuators and the polysilicon microelectrode.