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. Author manuscript; available in PMC: 2010 Oct 1.
Published in final edited form as: Nano Lett. 2009 Oct;9(10):3629–3634. doi: 10.1021/nl9018512

Figure 2.

Figure 2

Side view SEM of nanoimprint mold which consists of arrays of pillars etched in DLC through an HSQ mask. The height of the pillars is about 30nm and their diameter varies from ~10nm to ~37nm, depending on the applied electron dose.