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. Author manuscript; available in PMC: 2010 Mar 1.
Published in final edited form as: Proc IEEE Inst Electr Electron Eng. 2009;97(3):513–552. doi: 10.1109/JPROC.2009.2013612

Fig. 12.

Fig. 12

Piezoresistive coefficients as a function of doping. Experimental data obtained by Kerr, Tufte, and Mason are fitted by Harley and Kenny [79], [148], [149], [157]. Theoretical prediction by Kanda overestimates the piezoresistive coefficients at higher concentrations. After Harley and Kenny [149], © 2000 IEEE.