Fig. 16.

(a) SEM image of micro-actuator and 150-μm-long, 150-nm-diameter, phosphorous-doped, 〈110〉 silicon fiber (test sample) with resistivity of 0.6 mΩcm. (b) Percentage change longitudinal piezoresistance vs. strain exhibited less nonlinearity at low strain than previous reports at lower doping (Data of Matsuda et al. [161] were included by converting stress data using Young’s modulus of 170 GPa). Reprinted with permission from Chen and MacDonald [161], © 2004 American Institute of Physics.