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. Author manuscript; available in PMC: 2010 Mar 1.
Published in final edited form as: Proc IEEE Inst Electr Electron Eng. 2009;97(3):513–552. doi: 10.1109/JPROC.2009.2013612

Table 2.

Piezoresistive Coefficients Using Data From 0% to 1% Strain. From Chen and MacDonald [161], Reprinted With Permission From American Institute of Physics

[110] longitudinal piezoresistive coefficients Piezoresistance of n-type silicon fiber with doping level of 2×1020 cm−3 Tufte and Stelzer [163] n-type silicon with doping level of 2×1020 cm−3
First-order π1(10−4MPa−1) −1.86 ± 0.01 −1.9
Second-order π2(10−7MPa−2) 0.12 ± 0.01 N/A
Third-order π3(10−10MPa−3) 0.100 ± 0.003 N/A