TABLE I. Experiment Results for Sensing Evaluation of ITrem.
X axis | Y axis | Z axis | |
RMS (μm) | 17.37 | 17.84 | 9.87 |
RMS (mm/s2) | 70.74 | 72.92 | 36.15 |
RMSE (μm) | 2.44 | 2.52 | 1.04 |
RMSE (mm/s2) | 13.09 | 10.95 | 4.56 |
Position accuracy (%) | 86.59 | 84.97 | 89.79 |
Acceleration accuracy (%) | 81.75 | 84.87 | 87.41 |