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. Author manuscript; available in PMC: 2010 Mar 4.
Published in final edited form as: IEEE Sens J. 2009 Dec 1;9(12):1864–1871. doi: 10.1109/JSEN.2009.2030980

TABLE I. Experiment Results for Sensing Evaluation of ITrem.

X axis Y axis Z axis
RMS (μm) 17.37 17.84 9.87
RMS (mm/s2) 70.74 72.92 36.15
RMSE (μm) 2.44 2.52 1.04
RMSE (mm/s2) 13.09 10.95 4.56
Position accuracy (%) 86.59 84.97 89.79
Acceleration accuracy (%) 81.75 84.87 87.41