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. Author manuscript; available in PMC: 2010 Mar 17.
Published in final edited form as: J Vac Sci Technol B Microelectron Nanometer Struct Process Meas Phenom. 2009;27(6):2795–2800. doi: 10.1116/1.3258146

Fig. 6.

Fig. 6

SEM image showing cross section of the nanotrenches in SU-8. The topmost nanoslot opening is as narrow as 15 nm.