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. Author manuscript; available in PMC: 2011 Feb 10.
Published in final edited form as: Nano Lett. 2010 Feb 10;10(2):719–725. doi: 10.1021/nl903968s

Figure 2.

Figure 2

AFM images showing arrays of nanoscale openings nanofabricated in the parylene templates – (a) 180nm lines and (b) 90nm spots. The parylene template is pinhole-free at 400nm thickness.