Table 1.
DOSXYZnrc in source (y) |
EMCM in reference (Y) |
EBDI in reference (Y) |
TDI in reference (Y) |
||
---|---|---|---|---|---|
Layer 8 | M | 0.5 | 1.5 | 1.478 | |
E | 0.684 | 1.734 | 1.734 | ||
D | 1.368 | 1.156 | 1.173 | 1.221 | |
Layer 9 | M | 2.0 | 1.0 | 1.022 | |
E | 2.148 | 1.098 | 1.098 | ||
D | 1.074 | 1.098 | 1.074 | 1.074 | |
Layer 12 | M | 2.0 | 1.0 | 1.031 | |
E | 2.103 | 1.086 | 1.086 | ||
D | 1.052 | 1.086 | 1.053 | 1.052 | |
Layer 13 | M | 0.5 | 1.5 | 1.469 | |
E | 0.671 | 1.688 | 1.688 | ||
D | 1.342 | 1.125 | 1.149 | 1.197 |