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An MEMS scanner. (a) Scanning electron micrograph of 2D MEMS vertical comb scanner. Electrostatically driven angular vertical comb actuators rotate the 1-mm-diameter mirror about the torsion beams. Gimbal mounting of the mirror and actuators allows 2D scanning. Scale bar, 500 μm. (b) Scanning electron micrograph of vertical comb actuators. Scale bar, 100 μm. Material is this figure is based on work by Piyawattanametha et al.71
