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. Author manuscript; available in PMC: 2010 Apr 21.
Published in final edited form as: J Microelectromech Syst. 2009 Jan 1;18(6):1234–1245. doi: 10.1109/jmems.2009.2030075

Fig. 5.

Fig. 5

Results of penetration-force measurement tests showing (a) the maximum force required for a 60-μm-wide silicon probe to penetrate through various composite materials and (b) the percentage of attempts that resulted in microelectrode buckling.