Fig. 16.

(a) Solid lines show the calculated deposited energy density as a function of radius for incident 300 keV electrons on the 3-layer (black) and 2-layer, i.e., backthinned, models for the MAPS detector. The dotted lines show the cumulative integrals of the corresponding point spread functions as a function of radius. By definition these must equal unity for large radius. (b) Comparison of measured $(\circ )$ and various calculated MTF results for MAPS detector at 300 keV. The MTF calculated from the PSF and an edge simulation are shown as solid and dashed lines, respectively. The backthinned MTF is shown in grey. The calculated edge MTF multiplied by $\exp (-0.26{\omega }^2)$ is indistinguishable from the measured MTF.