Fig. 3.

Nonlinearity imaging in 1.09 μm thick polycrystalline capacitors. (A) Surface topography and (B) resonance frequency map. Arrows mark the contamination spots and associated frequency shifts. Histograms of (C) position-dependent resonance frequency and (D) shift in resonance frequency as a function of bias dependence at any point (same scale). Maps (arbitrary units) of nonlinear fitting coefficients—(E) slope, a₂, (proportional to d_33,init) (F) quadratic coefficient, a₃ (proportional to α_d) and (G) ratio α_d/d_33,init.