Table 1.

Resolution of BE-PFM measurements as a function of PZT film thickness

PZT film thickness	Estimated lateral resolution	Estimated volume sampled
	∼(aH + bL): a = 0.14, b = 0.40	(area * thickness)
0.53 μm	0.094 μm	∼0.0037 μm3
1.09 μm	0.173 μm	∼0.025 μm3
2.06 μm	0.308 μm	∼0.15 μm3
4.04 μm	0.586 μm	∼1.09 μm3

Note that this estimate of resolution was derived for vertical domain walls in the fully elastically coupled material, and provides an upper estimate for columnar films.

H - PZT thickness, L - Electrode thickness