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A) Chemical etching by Ag+ and HF was employed to produce a silicon nanopillar (SiNP) array on a silicon wafer. The SEM images reveal that well-defined SiNPs with diameters ranging from 100 to 200 nm and lengths around 10 µm were produced. B) Grafting of biotinylated epithelial-cell adhesion-molecule antibody (anti-EpCAM) onto silicon substrates.
