| Etch mode | Passivation mode | |
|---|---|---|
| Process time: | 6 s | 4.5 s |
| Overrun: | 0.5 s | 0 s |
| Platen generator power: | 80 W | 60 W |
| Coil generator power: | 600 W | 600 W |
| Gas: | SF6 (70 sccm) | C4F8 (35 sccm) |
| Etch rate: | 1.47 μm/min | N/A |
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