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Third-order aberration coefficient change after AO compensation. (a) Uncompensated coefficients corresponding to Fig. 2a. The x axis represents Zernike coefficients; 4 is Z2,2, 5 is Z2,−2, 6 is Z3,1, 7 is Z3,−1, and 8 is Z4,0. The error of the wavefront measurement is less than 2 nm. (b) Compensated coefficients.
