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. 2010 Sep 22;99(6):1986–1995. doi: 10.1016/j.bpj.2010.07.021

Figure 1.

Figure 1

Representative second-generation MEMS device for collagen fibril in vitro fracture test. (a) A low magnification SEM image of MEMS device, consisting of a fixed pad (FP), a movable pad (MP), a force gauge pad (FGP), anchors (A), and tether beams (T). Compared with the first-generation MEMS device used in a previous in-air study (24), two new features were added, including a pushing hole (PH) which allows a sharp probe to mechanically push the device and a force gauge (FG) consisting of two tether beams connecting FGP and MP for force measurement. (b) An optical image of a collagen fibril specimen fixed onto a MEMS device. Three micron-size epoxy droplets were used to fix the specimen, including one on the movable pad and two on the fixed pad. Three portions of collagen fibril specimen were visible. The middle portion (between movable pad and fixed pad) was the testing piece used for in vitro fracture test. The right portion (between the two epoxy droplets on the fixed pad) was used for diameter measurement.