TABLE VII.
1-layer |
3-layer |
||||
---|---|---|---|---|---|
System voltage (%) |
Displacement (μm) |
Contrast | System voltage (%) |
Displacement (μm) |
Contrast |
67 | 1.9 | 0.6 | 57 | 1.9 | 0.6 |
77 | 2.4 | 0.6 | 67 | 2.5 | 0.6 |
87 | 3.1 | 0.6 | 77 | 3.2 | 0.6 |
Note that the low-loss 3-layer array shows equivalent displacements at lower voltage transmit levels and equivalent contrast across all reported transmit voltages. The variations in displacement and contrast over 4 trials were negligible (<0.06 μm and < 0.02, respectively).