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. Author manuscript; available in PMC: 2011 Sep 21.
Published in final edited form as: Sens Actuators B Chem. 2010 Sep 21;150(1):465–470. doi: 10.1016/j.snb.2010.06.059

Table 1.

Comparison of different structure combination. Multi layer structure with Ta2O5underneath parylene C could severely improve the breakdown voltage and did not significantly increase the actuation voltage.

Device Structure Effective Capacitance
(t/εr)1/2 		Actuation Threshold
Voltage		 Breakdown Voltage
200nm Parylene C/70nm CYTOP 0.316 (µm)1/2 11V 35V
200nm Ta2O5/200nm Parylene C/70nm CYTOP 0.330 (µm)1/2 10V 70V
120nm Ta2O5/200nm Parylene C/70nm CYTOP 0.325 (µm)1/2 10V 60V
200nm Ta2O5/100nm Parylene C/70nm CYTOP 0.275 (µm)1/2 8V 26V
200nm Ta2O5/70nm CYTOP 0.205 (µm)1/2 6V 18V