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. Author manuscript; available in PMC: 2010 Oct 20.
Published in final edited form as: Acta Mech Sin. 2009 Feb 1;25(1):1–12. doi: 10.1007/s10409-008-0222-6

Figure 13.

Figure 13

(a) NEMS system based on a vibrating cantilever monolithically integrated on to a CMOS circuitry. (b) Optical images of the nano-mechanical resonator integrated to a voltage amplifier.